2018 International Conference on Solid State Devices and Materials

Presentation information

Oral Presentation

03: Interconnect / 3D Integrations / MEMS

[G-7] MEMS Application

Thu. Sep 13, 2018 9:00 AM - 10:45 AM Room 231 (School of Engineering Bldg.2 North Wing third floor)

Session Chair: T. Minari(NIMS), K. Shiojima(Univ. of Fukui)

9:00 AM - 9:30 AM

[G-7-01 (Invited)] MEMS Vibrational Energy Harvesters for Perpetual Electronics

H. Toshiyoshi1 (1. Univ. of Tokyo(Japan))