2019 International Conference on Solid State Devices and Materials

Session information

Satellite Workshop

[SW] Satellite Workshop
~Current Status and Future of Plasma Process~

Mon. Sep 2, 2019 1:00 PM - 5:30 PM IB Lecture Hall (IB 2F)

Plasma processing is an indispensable technology in the production of semiconductor devices such as ultra-large scale integrated circuits (ULSI) and power MOSFETs. For example, advanced devices such as 3D memories, FinFETs, and so forth, cannot be realized without the evolution of plasma processes. On the other hand, plasma diagnostic techniques and control technologies developed in the semiconductor field are applied to new fields in recent years. From biochips/biosensing to the automotive/aerospace fields, as well as medical, agricultural and fisheries applications of plasma, plasma is a driving force for creating various interdisciplinary areas. Furthermore, attempts to understand and control plasma processes using computer simulation and AI technology have attracted much attention. In this workshop, six researchers review each aspect of plasma technology. This workshop provides an opportunity to understand current status and see the future of the plasma process.

Break (2:40 PM - 3:00 PM)



Abstract password authentication.
A password is required to view abstracts. You can find the password in the "Advance Program".
The "Advance Program" is handed out at the registration desk to registered participants.


Please log in with your participant account.
» Participant Log In