2019 International Conference on Solid State Devices and Materials

Presentation information

Oral Presentation

11: Advanced Materials Synthesis, Crystal Growth and Characterization

[F-1] Advanced Characterization Techniques

Tue. Sep 3, 2019 2:00 PM - 3:30 PM ES033 (ES 3F)

Session Chair:J. Yamaguchi(Fujitsu Labs. Ltd.), S. Ogawa(Toray Research Center, Inc.)

2:00 PM - 2:30 PM

[F-1-01 (Invited)] Nanoscale 3-dimensional characterization of wide bandgap power and microdevices

L.J. Brillson1, H. Gao1, C.H. Lin2, G. Foster3, J. Cox4 (1. The Ohio State Univ.(USA), 2. Intel Corporation(USA), 3. U.S. Naval Research Laboratory(USA), 4. Univ. of California, Los Angeles(USA))