2019 International Conference on Solid State Devices and Materials

Presentation information

Oral Presentation

10: Thin Film Electronics: Oxide, Non-single Crystalline and Novel Process

[G-1] Oxide Device and Integration

Tue. Sep 3, 2019 2:00 PM - 3:30 PM ES034 (ES 3F)

Session Chair: S. Higashi (Hiroshima Univ.), K. Hayashi (Kobe Steel, Ltd.)

2:00 PM - 2:30 PM

[G-1-01 (Invited)] Characteristics of Scaled CAAC-IGZO FET and Its Application to LSI

K. Kato1, H. Kunitake1, T. Onuki1, K. Tsuda1, S. Ohshita1, D. Shimada1, Y. Yanagisawa1, T. Murakawa1, T. Atsumi1, S. Yamazaki1 (1.Semiconductor Energy Laboratory Co., Ltd. (Japan))

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