2019 International Conference on Solid State Devices and Materials

Presentation information

Oral Presentation

10: Thin Film Electronics: Oxide, Non-single Crystalline and Novel Process

[G-2] Crystal Growth of Group 4

Tue. Sep 3, 2019 3:45 PM - 5:30 PM ES034 (ES 3F)

Session Chair:W. Yeh(Shimane Univ.), P. T. Liu(NCTU)

3:45 PM - 4:15 PM

[G-2-01 (Invited)] Selective Laser Annealing Technology for LTPS Thin Film Transistors Fabrications

T. Goto1, K. Imokawa2, T. Yamada2, K. Saito3, J. Gotoh3, H. Ikenoue2, S. Sugawa1 (1. Tohoku Univ.(Japan), 2. Kyushu Univ.(Japan), 3. V Technology Co., Ltd.(Japan))