2019 International Conference on Solid State Devices and Materials

Presentation information

Oral Presentation

02: Advanced / Emerging Memories and New Applications

[H-7] MRAM, PCRAM and Emerging Memories

Thu. Sep 5, 2019 1:00 PM - 2:30 PM IB011 (IB 1F)

Session Chair: H. Sato (Tohoku Univ.), M. H Lee (Macronix International Co., Ltd.)

1:30 PM - 1:45 PM

[H-7-02] High Reliability CoFeB/MgO/CoFeB Magnetic Tunnel Junction FabricationUsing Low-damage Ion Beam Etching

H. Park1, A. Teramoto1, J. Tsuchimoto1,2, K. Hashimoto1, T. Suwa1, M. Hayashi1,2, R. Kuroda1, S. Sugawa1 (1.Tohoku Univ. (Japan), 2.Canon-Anelva Corp. (Japan))

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