RF Power Performance of 2DHG Diamond MOSFETs with thick ALD-Al<sub>2</sub>O<sub>3</sub> Film

K. Kudara

doi:https://doi.org/10.7567/SSDM.2019.K-5-02

9:30 AM - 9:45 AM

[K-5-02] RF Power Performance of 2DHG Diamond MOSFETs with thick ALD-Al₂O₃ Film

^○K. Kudara¹, S. Imanishi¹, K. Horikawa¹, A. Hiraiwa¹, H. Kawarada^1,2 (1.Waseda Univ. (Japan), 2.Kagami Memorial Res. Inst. for Materials Science and Tech. (Japan))

https://doi.org/10.7567/SSDM.2019.K-5-02

2019 International Conference on Solid State Devices and Materials

[K-5-02] RF Power Performance of 2DHG Diamond MOSFETs with thick ALD-Al2O3 Film

[K-5-02] RF Power Performance of 2DHG Diamond MOSFETs with thick ALD-Al₂O₃ Film