The Japan Society of Applied Physics

9:00 AM - 9:30 AM

[M-3-01 (Invited)] Integrated Hybrid MEMS Hydrogen Sensor with high sensitivity and wide dynamic range

H. Yamazaki1, Y. Hayashi1, K. Masunishi1, T. Saito1, D. Ono1, N. Nakamura1, A. Kojima1 (1.Toshiba Corp. (Japan))

https://doi.org/10.7567/SSDM.2019.M-3-01