2019 International Conference on Solid State Devices and Materials

Presentation information

Oral Presentation

Joint Session(Area1&3+SP)

[M-3] Advanced Integration Technologies

Wed. Sep 4, 2019 9:00 AM - 10:30 AM IB015 (IB 1F)

Session Chair:H. Majima(Toshiba Electronic Devices & Storage Corp.), M. Ueki(Sony Semiconductor Manufacturing Corp.)

9:00 AM - 9:30 AM

[M-3-01 (Invited)] Integrated Hybrid MEMS Hydrogen Sensor with high sensitivity and wide dynamic range

H. Yamazaki1, Y. Hayashi1, K. Masunishi1, T. Saito1, D. Ono1, N. Nakamura1, A. Kojima1 (1. Toshiba Corp.(Japan))