The Japan Society of Applied Physics

9:00 AM - 9:30 AM

[N-5-01 (Invited)] FinFET Extension towards N3 and Beyond – Local Fin Trimming

T. Miyashita1, S. Mittal1, K. Suen1, M.S. Kim1, A. Pal1, A. Sachid1, M. Cogorno1 (1.Applied Materials, Inc. (USA))

https://doi.org/10.7567/SSDM.2019.N-5-01