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[PS-10-17 (Late News)] The investigation of nitrogen-doped LaB₆ thin film formation on n-Si(100) substrate utilizing RF sputtering

^○K.E. Park¹, H. Kamata¹, S. Ohmi¹ (1.Tokyo Tech (Japan))

https://doi.org/10.7567/SSDM.2019.PS-10-17