10:55 AM - 10:57 AM

[PS-5-06] Effect of Joule Heating on Titanium Microbolometer with Integrated Heater and Thermistor

^○D. Elamaran¹, K. Akiba², H. Satoh³, N. Hiromoto², H. Inokawa³ (1.GSST, Shizuoka Univ. (Japan), 2.GSIST, Shizuoka Univ. (Japan), 3.RIE, Shizuoka Univ. (Japan))