2020 International Conference on Solid State Devices and Materials

Presentation information

Oral presentation

01: Advanced CMOS: Material Fundamentals / Process Science / Device Physics

[A-5] Advanced CMOS Technology

Tue. Sep 29, 2020 2:00 PM - 3:30 PM Room A

Session Chair: Yoshinari Kamakura (Osaka Inst.of Tech.), Nicolas Planes(STMicroelectronics)

2:00 PM - 2:30 PM

[A-5-01 (Invited)] Towards extreme scaling of logic standard cells using Forksheet devices

〇Pieter Weckx1 (1. imec(Belgium))

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