2020 International Conference on Solid State Devices and Materials

Presentation information

Oral presentation

01: Advanced CMOS: Material Fundamentals / Process Science / Device Physics

[A-6] Process Technology

Tue. Sep 29, 2020 4:00 PM - 5:45 PM Room A

Session Chair: Keisuke Yamamoto (Kyushu Univ.), Hiroshi Itokawa (Kioxia Corp.)

4:00 PM - 4:30 PM

[A-6-01 (Invited)] Metal-Assisted Solid Phase Crystallization of Vertical Si Channel in 3D Flash Memory

〇Hidenori Miyagawa1, Haruka Kusai1, Riichiro Takaishi1, Tomoya Kawai1, Yuuichi Kamimuta1, Toshiya Murakami1, Keiko Ariyoshi1, Takanori Asano1, Masakazu Goto1, Makoto Fujiwara1, Yuichiro Mitani1, Tomoyuki Obu2, Hideaki Aochi1 (1. Kioxia Corp.(Japan), 2. Western Digital Corp.(Japan))

Abstract password authentication.
Password to download abstracts has been informed in the welcome mail.

Password