The Japan Society of Applied Physics

4:30 PM - 4:45 PM

[B-10-03] 80nm Tall Thermally Stable Cost Effective FinFETs for Advanced DRAM Periphery Devices for AI/ML and Automotive Applications

〇Alessio Spessot1, Romain Ritzenthaler1, Eugenio Dentoni Litta1, Emmanuel Dupuy1, Barry O’Sullivan1, Joao Bastos1, Elena Capogreco1, Kenichi Miyaguchi1, Vladimir Machkaoutsan2, Younggwang Yoon3, Pierre Fazan2, Horiguchi Naoto1 (1. imec(Belgium), 2. Micron (Belgium), 3. SK Hynix(Belgium))

https://doi.org/10.7567/SSDM.2020.B-10-03