Enablement of Next Generation Nanosheet Technology

Nicolas Loubet, Curtis Durfee , Julien Frougier, Shogo Mochizuki, Maruf Bhuiyan , Ruqiang Bao , Andrew Greene, Eric Miller, Indira Seshadri

doi:https://doi.org/10.7567/SSDM.2021.A-7-01

9:00 AM - 9:30 AM

[A-7-01 (Invited)] Enablement of Next Generation Nanosheet Technology

〇Nicolas Loubet¹, Curtis Durfee ¹, Julien Frougier¹, Shogo Mochizuki¹, Maruf Bhuiyan ¹, Ruqiang Bao ¹, Andrew Greene¹, Eric Miller¹, Indira Seshadri¹ (1.IBM Research)

https://doi.org/10.7567/SSDM.2021.A-7-01

2021 International Conference on Solid State Devices and Materials

[A-7-01 (Invited)] Enablement of Next Generation Nanosheet Technology