Hybrid III-V/Si photonic device integration based on template-assisted selective epitaxy

Markus Scherrer, Preksha Tiwari, Pengyan Wen, Noelia Vico Trivino, Svenja Mauthe, Marilyne Sousa, Heinz Schmid, Kirsten Moselund

doi:https://doi.org/10.7567/SSDM.2021.H-6-01

3:45 PM - 4:15 PM

[H-6-01 (Invited)] Hybrid III-V/Si photonic device integration based on template-assisted selective epitaxy

Markus Scherrer¹, Preksha Tiwari¹, Pengyan Wen¹, Noelia Vico Trivino¹, Svenja Mauthe¹, Marilyne Sousa¹, Heinz Schmid¹, 〇Kirsten Moselund¹ (1.IBM Research Europe - Zurich)

https://doi.org/10.7567/SSDM.2021.H-6-01

2021 International Conference on Solid State Devices and Materials

[H-6-01 (Invited)] Hybrid III-V/Si photonic device integration based on template-assisted selective epitaxy