2022 International Conference on Solid State Devices and Materials

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Oral Presentation

11: Advanced Materials: Synthesis / Crystal Growth / Characterization

[B-2] Wide Bandgap Materials

Tue. Sep 27, 2022 2:00 PM - 3:45 PM 102 (1F)

Session Chair: Shingo Ogawa (Toray Res. Center, Inc.), Takuya Hoshi (NTT Device Technology Lab.)

2:00 PM - 2:30 PM

[B-2-01 (Invited)] Metrology to Support Processing and Development of 4H-SiC CMOS and Power Devices at Fraunhofer IISB from Research to Multi Project Wafer Services

〇Mathias Rommel1, Tobias Erlbacher1 (1. Fraunhofer Inst. for Integrated Systems and Device Tech. IISB (Germany))

Presentation style: Online

https://doi.org/10.7567/SSDM.2022.B-2-01

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