2022 International Conference on Solid State Devices and Materials

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Oral Presentation

Joint Session (Area1&10)

[E-4] Oxide Semiconductors for Logic and Memory Applications

Wed. Sep 28, 2022 9:00 AM - 11:15 AM 105 (1F)

Session Chair: Mamoru Furuta (Kochi Univ. of Technology), Masaharu Kobayashi (Univ. of Tokyo)

9:00 AM - 9:30 AM

[E-4-01 (Invited)] Atomic-layer-deposited atomically thin In2O3 channel for BEOL logic and memory applications

〇Peide D. Ye1 (1. Purdue Univ. (United States of America))

Presentation style: Online

https://doi.org/10.7567/SSDM.2022.E-4-01

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