2022 International Conference on Solid State Devices and Materials

Presentation information

Oral Presentation

Focus Session 2 (Area1&2&8)

[F-10] CMOS and Memory Applications of Low Dimensional Materials II

Thu. Sep 29, 2022 4:00 PM - 5:45 PM 201 (2F)

Session Chair: Takamasa Kawanago (Tokyo Tech), Sakura Takeda (NAIST)

5:15 PM - 5:45 PM

[F-10-05 (Invited)] 2D transistor top and bottom gate stack scaling in 300mm pilot line

〇Quentin Smets1, Tom Schram1, Daire Cott1, Anish Dangol1, Dennis Lin1, Souvik Ghosh1, Rudy Verheyen1, Steven Brems1, Benjamin Groven1, Pierre Morin1, Inge Asselberghs1, Gouri Sankar Kar1 (1. imec (Belgium))

Presentation style: Online

https://doi.org/10.7567/SSDM.2022.F-10-05

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