5:15 PM - 5:45 PM

[F-10-05 (Invited)] 2D transistor top and bottom gate stack scaling in 300mm pilot line

〇Quentin Smets¹, Tom Schram¹, Daire Cott¹, Anish Dangol¹, Dennis Lin¹, Souvik Ghosh¹, Rudy Verheyen¹, Steven Brems¹, Benjamin Groven¹, Pierre Morin¹, Inge Asselberghs¹, Gouri Sankar Kar¹ (1. imec (Belgium))

Presentation style: Online

https://doi.org/10.7567/SSDM.2022.F-10-05