Analysis of Grain Boundary Effect in GIDL-erase-scheme Vertical CTF Strings for High Stacked CMOS under Array 3-D NAND Flash

11:15 AM - 11:30 AM

[F-5-02] Analysis of Grain Boundary Effect in GIDL-erase-scheme Vertical CTF Strings for High Stacked CMOS under Array 3-D NAND Flash

〇Moonkyu Song¹, Joe Friedman¹, Sanjay K. Banerjee¹ (1. Univ. of Texas at Austin (United States of America))

Presentation style: Online