The Japan Society of Applied Physics

2022 International Conference on Solid State Devices and Materials

2022 International Conference on Solid State Devices and Materials

2022年9月26日 〜 2022年12月23日
幕張メッセ

15:00 〜 15:15

[J-2-04] Self-terminating Photo-electrochemical (PEC) Etching for Recessed-gate Fabrication on AlGaN/GaN HEMTs

〇Takuya Togashi1, Kosaku Ito1, Taketomo Sato1 (1. Hokkaido Univ. (Japan))

Presentation style: On-site (in-person)

https://doi.org/10.7567/SSDM.2022.J-2-04

The controllability of photo-electrochemical (PEC) etching was investigated for the fabrication of recessed-gate AlGaN/GaN HEMTs. The self-termination depth of the PEC etching was strongly dependent on the light power intensity, showing that the photovoltaic effect of the electrolyte/AlGaN system is the driving force for PEC etching.