14:45 〜 15:00

[K-6-05 (Late News)] Evaluation of Reactive Sputtered Ti-group MAX Alloy for Wiring Material

〇Takeyasu Saito¹, Kazunobu WAKAMATSU¹, Kazuki UEDA¹, Naoki OKAMOTO¹ (1. Osaka Metropolitan Univ. (Japan))

Presentation style: On-site (in-person)

https://doi.org/10.7567/SSDM.2022.K-6-05