2023 International Conference on Solid State Devices and Materials

Session information

Oral Presentation

10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

[E-6] Thin films for sensors and gate insulators

Fri. Sep 8, 2023 10:45 AM - 12:00 PM Room E (223, Bldg. 2)

Session Chairs: Mamoru Furuta (Kochi Univ. of Technology), Chih-Yu Chang (TSMC)

10:45 AM - 11:00 AM

Chang- Yu Liao1, Rong-Ming Ko2, Yu-Hao Chen1, Chien-Hung Wu3, Shui-Jinn Wang1,2 (1. Inst. of Microelectronics, Department of Electrical Eng., National Cheng Kung Univ., Tainan (Taiwan), 2. Academy of Innovative Semiconductor and Sustainable Manufac., National Cheng Kung Univ., Tainan (Taiwan), 3. Department of Optoelectronics and Materials Eng., Chung Hua Univ., Hsinchu (Taiwan))

11:00 AM - 11:15 AM

Moumita Deb1, Ngoc Khanh Tran Ho2, Hsin Fei Meng2, Olivier Soppera3, Hsiao Wen Zan1 (1. Department of Photonics, College of Electrical and Computer Engineering, National Yang Ming Chiao Tung Univ. (Taiwan), 2. Institute of Physics, National Yang Ming Chiao Tung Univ. (Taiwan), 3. Université de Haute-Alsace, CNRS, IS2M (France))

11:15 AM - 11:30 AM

Che-Chuan Liu1, Hsin-Yi Shen1, Kuangye Wang2, Yu-Lun Chueh2, Yue-Der Chih3, Jonathen Chang3, Jiaw-Ren Shih1, Chrong-Jung Lin1, Ya-Chin King1 (1. Microelectronics Laboratory, Institute of Electronics Engineering, National Tsing Hua Univ. (Taiwan), 2. Department of Materials Science and Engineering, National Tsing Hua Univ. (Taiwan), 3. Design and Technology Platform, Taiwan Semiconductor Manufacturing Company (tsmc) (Taiwan))

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