セッション情報

Oral Presentation

01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[F-8] Advanced CMOS: Device Technology 2

2023年9月8日(金) 15:30 〜 16:30 Room F (224, Bldg. 2)

Session Chairs: Keisuke Yamamoto (Kyushu Univ), Anabela Veloso (imec)

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15:30 〜 16:00

[F-8-01 (Invited)] Vertical-Transport Nanosheet Technology for Scaling beyond the Lateral-Transport Devices CMOS Era

^○Hemanth Jagannathan¹ (1. IBM Research (United States of America))

16:00 〜 16:15

[F-8-02] Holistic Analysis of Asymmetry in Vertical Silicon Gate-all-around Nanosheet FETs

^○Jinsu Jeong¹, Sanguk Lee¹, Seunghwan Lee¹, Junjong Lee¹, Jaewan Lim¹, Rock-Hyun Baek¹ (1. Pohang Univ. of Sci. and Tech. (POSTECH) (Korea))

16:15 〜 16:30

[F-8-03] 3D Stack Ultra High Resistance Via Matrix by Cu BEOL Structuresin Nano-scaled CMOS Processing Node

Li-Yu Yeh¹, ^○Ya-Lin Chang¹, Yue-Der Chih², Jonathan Chang², Chrong-Jung Lin¹, Ya-Chin King¹ (1. National Tsing Hua University (Taiwan), 2. Design Technology Platform, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan (Taiwan))

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