10:45 AM - 11:15 AM
○Geert Hellings1, Sheng Yang1, Pieter Weckx1, Marie Garcia Bardon1, Maarten Van de Put1, Julien Ryckaert1 (1. imec (Belgium))
Focus Session
Focus Session (Area 1&3)
Fri. Sep 8, 2023 10:45 AM - 12:00 PM Room G (231, Bldg. 2)
Session Chairs: Takeshi Nogami (IBM Research), Nicolas Planes (STMicroelectronics)
10:45 AM - 11:15 AM
○Geert Hellings1, Sheng Yang1, Pieter Weckx1, Marie Garcia Bardon1, Maarten Van de Put1, Julien Ryckaert1 (1. imec (Belgium))
11:15 AM - 11:45 AM
○Amulya Athayde1 (1. Applied Materials, Inc. (United States of America))
11:45 AM - 12:00 PM
○Wei Feng1, Haruo Shimamoto1, Katsuya Kikuchi1 (1. National Inst. of Advanced Indus. Sci. and Tech. (AIST) (Japan))
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