Session information

Short Course

[SC-B] Short Course B
Plasma technology: Cornerstone of the post-scaling and next milestone of assurance energy and environment

Tue. Sep 5, 2023 1:00 PM - 5:00 PM Room K (234, Bldg. 2)

Organizer: Kenji Ishikawa (Nagoya Univ.)
Chair: Masanori Terahara (Western Digital)

1:00 PM - 1:45 PM

〇Andreas Mai¹ (1. IHP)

1:45 PM - 2:30 PM

〇Naoto Horiguchi¹ (1. imec)

2:30 PM - 3:15 PM

〇Masaru Izawa¹ (1. Hitachi High-Tech Corp.)

Break (3:15 PM - 3:30 PM)

3:30 PM - 4:15 PM

〇Akihiro Tsuji¹ (1. Tokyo Electron Ltd.)

4:15 PM - 5:00 PM

〇Yasuhiro Morikawa¹ (1. ULVAC, Inc.)

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