Sessions

Short Course

2 results (1 - 2)

Short Course

[SC-A] Short Course A
Leading-edge CMOS Technology for 2nm-node and beyond

Tue. Sep 5, 2023 1:00 PM - 5:45 PM Room F (224, Bldg. 2)

Organizer: Meishoku Masahara (AIST)
Chair: Toshifumi Irisawa (AIST)

Short Course

[SC-B] Short Course B
Plasma technology: Cornerstone of the post-scaling and next milestone of assurance energy and environment

Tue. Sep 5, 2023 1:00 PM - 5:00 PM Room K (234, Bldg. 2)

Organizer: Kenji Ishikawa (Nagoya Univ.)
Chair: Masanori Terahara (Western Digital)