The Japan Society of Applied Physics

9:00 AM - 9:30 AM

[C-3-01 (Invited)] Stability Issues in Oxide TFTs for VLSI Applications

Junghwan Kim1 (1. UNIST (Korea))

https://doi.org/10.7567/SSDM.2023.C-3-01

In this work, we show a reason why high-mobility oxide TFTs tends to exhibit poor reliability such as NBTS and PBTS. It is revealed that the NBTS mechanism is mainly attributed to the Fermi level shift of active layer itself and it is highly dependent on the conduction band minimum location. Moreover, we show that the oxide semiconductors with higher mobility possess deeper CBM levels and shallower donor levels.