The Japan Society of Applied Physics

9:45 AM - 10:00 AM

[C-3-03] A Study of Stable Gallium-Tin-Oxide Thin-Film Transistors by Ultrasonic Spray Pyrolysis Deposition

Hao Chun Hung1, Wei Chou Hsu1, Han Yin Liu2, Teng Yuan Chang1 (1. Univ. of National Cheng Kung (Taiwan), 2. Univ. of National Sun Yat-sen (Taiwan))

https://doi.org/10.7567/SSDM.2023.C-3-03

In this study, gallium tin oxide (GTO) thin-film transistors (TFTs) are fabricated by ultrasonic spray pyrolysis deposition (USPD) method, which has considerable advantages in process time and cost. The GTO TFT exhibits the on/off current ratio of ~109, subthreshold swing (SS) of 133.08 mV/dec, the field-effect mobility (μFE) of 33.79 cm2/V-s, the threshold voltage (Vth) of 0.41 V and the Vth shift under the 3000-seconds NBIS is -0.24 V by optimizing the Ga/Sn atomic ratio.