9:45 AM - 10:00 AM
[C-3-03] A Study of Stable Gallium-Tin-Oxide Thin-Film Transistors by Ultrasonic Spray Pyrolysis Deposition
In this study, gallium tin oxide (GTO) thin-film transistors (TFTs) are fabricated by ultrasonic spray pyrolysis deposition (USPD) method, which has considerable advantages in process time and cost. The GTO TFT exhibits the on/off current ratio of ~109, subthreshold swing (SS) of 133.08 mV/dec, the field-effect mobility (μFE) of 33.79 cm2/V-s, the threshold voltage (Vth) of 0.41 V and the Vth shift under the 3000-seconds NBIS is -0.24 V by optimizing the Ga/Sn atomic ratio.
