2023 International Conference on Solid State Devices and Materials

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Oral Presentation

10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

[C-3] Advanced process of oxide semiconductors

2023年9月7日(木) 09:00 〜 10:15 Room C (221, Bldg. 2)

Session Chairs: Keisuke Ide (Tokyo Tech), Kaoru Toko (Univ. of Tsukuba)

09:45 〜 10:00

[C-3-03] A Study of Stable Gallium-Tin-Oxide Thin-Film Transistors by Ultrasonic Spray Pyrolysis Deposition

○Hao Chun Hung1, Wei Chou Hsu1, Han Yin Liu2, Teng Yuan Chang1 (1. Univ. of National Cheng Kung (Taiwan), 2. Univ. of National Sun Yat-sen (Taiwan))

https://doi.org/10.7567/SSDM.2023.C-3-03

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