Synthesis of CuAlO <sub>2</sub>/Si heterostructures by DPDS-assisted LBL approach and their transistor characteristics

MEHDI ALI

doi:https://doi.org/10.7567/SSDM.2023.C-3-04

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Oral Presentation

10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

[C-3] Advanced process of oxide semiconductors

Thu. Sep 7, 2023 9:00 AM - 10:15 AM Room C (221, Bldg. 2)

Session Chairs: Keisuke Ide (Tokyo Tech), Kaoru Toko (Univ. of Tsukuba)

10:00 AM - 10:15 AM

[C-3-04] Synthesis of CuAlO ₂/Si heterostructures by DPDS-assisted LBL approach and their transistor characteristics

^○MEHDI ALI¹, Daiki Yamashita¹, Hideo Isshiki¹ (1. The University of Electro -Communications, Tokyo- Japan (Japan))

https://doi.org/10.7567/SSDM.2023.C-3-04

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Presentation information

[C-3] Advanced process of oxide semiconductors

[C-3-04] Synthesis of CuAlO 2/Si heterostructures by DPDS-assisted LBL approach and their transistor characteristics

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[C-3-04] Synthesis of CuAlO ₂/Si heterostructures by DPDS-assisted LBL approach and their transistor characteristics