2023 International Conference on Solid State Devices and Materials

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Oral Presentation

10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

[E-6] Thin films for sensors and gate insulators

Fri. Sep 8, 2023 10:45 AM - 12:00 PM Room E (223, Bldg. 2)

Session Chairs: Mamoru Furuta (Kochi Univ. of Technology), Chih-Yu Chang (TSMC)

10:45 AM - 11:00 AM

[E-6-01] Using thin-film transistor with thick oxygen-doped SZTO channel and patterned Pt/NiO capping layer to enhance ultraviolet light sensing performance

○Chang- Yu Liao1, Rong-Ming Ko2, Yu-Hao Chen1, Chien-Hung Wu3, Shui-Jinn Wang1,2 (1. Inst. of Microelectronics, Department of Electrical Eng., National Cheng Kung Univ., Tainan (Taiwan), 2. Academy of Innovative Semiconductor and Sustainable Manufac., National Cheng Kung Univ., Tainan (Taiwan), 3. Department of Optoelectronics and Materials Eng., Chung Hua Univ., Hsinchu (Taiwan))

https://doi.org/10.7567/SSDM.2023.E-6-01

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