2023 International Conference on Solid State Devices and Materials

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Oral Presentation

10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

[E-6] Thin films for sensors and gate insulators

Fri. Sep 8, 2023 10:45 AM - 12:00 PM Room E (223, Bldg. 2)

Session Chairs: Mamoru Furuta (Kochi Univ. of Technology), Chih-Yu Chang (TSMC)

11:00 AM - 11:15 AM

[E-6-02] Development of a Low-Powered, Ultra-Sensitive, Room-Temperature-Operated SnO 2-Based NOx Gas Sensor Using Sol-Gel Technique

○Moumita Deb1, Ngoc Khanh Tran Ho2, Hsin Fei Meng2, Olivier Soppera3, Hsiao Wen Zan1 (1. Department of Photonics, College of Electrical and Computer Engineering, National Yang Ming Chiao Tung Univ. (Taiwan), 2. Institute of Physics, National Yang Ming Chiao Tung Univ. (Taiwan), 3. Université de Haute-Alsace, CNRS, IS2M (France))

https://doi.org/10.7567/SSDM.2023.E-6-02

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