2023 International Conference on Solid State Devices and Materials

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Oral Presentation

10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

[E-6] Thin films for sensors and gate insulators

Fri. Sep 8, 2023 10:45 AM - 12:00 PM Room E (223, Bldg. 2)

Session Chairs: Mamoru Furuta (Kochi Univ. of Technology), Chih-Yu Chang (TSMC)

11:30 AM - 11:45 AM

[E-6-04] Reducing Leakage Current with Wider-Bandgap Alumina Films Formed by Ultrathin-AlN Oxidation

○Yusuke Nakajima1, Akira Takashima1, Masaki Noguchi1, Tatsunori Isogai1 (1. KIOXIA Corp. (Japan))

https://doi.org/10.7567/SSDM.2023.E-6-04

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