The Japan Society of Applied Physics

2023 International Conference on Solid State Devices and Materials

2023 International Conference on Solid State Devices and Materials

2023年9月5日 〜 2023年10月31日
Nagoya Congress Center

13:45 〜 14:15

[E-7-01 (Invited)] System-on-Glass Technology with LTPS TFTs

○Yoshiharu Nakajima1 (1. Japan Display Inc. (Japan))

https://doi.org/10.7567/SSDM.2023.E-7-01

Low temperature polycrystalline Si (LTPS) TFT technology enables the integration of circuit and system on the glass substrate. This paper discusses the history and future of System-on-Glass technology with LTPS technology for displays and sensors.