2023 International Conference on Solid State Devices and Materials

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Oral Presentation

10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

[E-8] Group IV cyrstal growth and applications

Fri. Sep 8, 2023 3:30 PM - 4:15 PM Room E (223, Bldg. 2)

Session Chairs: Kenta Moto (Kyushu Univ.), Toshiya Murakami (KIOXIA)

3:45 PM - 4:00 PM

[E-8-02] Exploration of Underlayers for Improving Crystal and Electrical Properties of Polycrystalline Ge Thin Films

○Kota Igura1, Shintaro Maeda1, Takamitsu Ishiyama1, Takashi Suemasu1, Kaoru Toko1 (1. Univ. of Tsukuba (Japan))

https://doi.org/10.7567/SSDM.2023.E-8-02

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