2023 International Conference on Solid State Devices and Materials

Presentation information

Oral Presentation

01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[F-1] Modeling, Simulation and Characterization

Wed. Sep 6, 2023 2:00 PM - 3:45 PM Room F (224, Bldg. 2)

Session Chairs: Satofumi Souma (Kobe Univ.), Hidetoshi Oishi (Sony Semiconductor Solutions Corp.)

2:30 PM - 2:45 PM

[F-1-03] Demonstration of Cavity Capacitor for Advanced Nanosheet Gate Stack Study

Camila Cavalcante1, H. Arimura1, Y. Oniki1, F. Sebaai1, E. Capogreco1, L-A. Ragnarsson1, B.T. Chan1, A. Hikavyy1, H. Mertens1, K. Vandersmissen1, E. Dentoni Litta1, S. Subramanian1, S. Biesemans1, N. Horiguchi1 (1. imec (Belgium))

https://doi.org/10.7567/SSDM.2023.F-1-03

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