2023 International Conference on Solid State Devices and Materials

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Oral Presentation

01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[F-4] Innovative Devices and Sensing Technology

Thu. Sep 7, 2023 10:45 AM - 11:45 AM Room F (224, Bldg. 2)

Session Chairs: Hidetoshi Oishi (Sony Semiconductor Solutions Corp.), Nobuyuki Mise (Hitachi High-Tech Corp.)

10:45 AM - 11:00 AM

[F-4-01] On-Wafer 3D E-beam Detector Cube by FinFET CMOS Technologies

Yi-Han Huang1, Kuan-Chung Chiu1, ○Yu-Jie Teng1, Burn Jeng Lin1, Jiaw-Ren Shih2, Faith Yuh2, Yue-Der Chih2, Jonathan Chang2, Chrong Jung Lin1, Ya-Chin King1 (1. Inst. of Electronics Engineering, National Tsing Hua Univ. (Taiwan), 2. Taiwan Semiconductor Manufac. Company (Taiwan))

https://doi.org/10.7567/SSDM.2023.F-4-01

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