2023 International Conference on Solid State Devices and Materials

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Oral Presentation

01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[F-5] Advanced CMOS: Process Technology

Fri. Sep 8, 2023 9:00 AM - 10:15 AM Room F (224, Bldg. 2)

Session Chairs: Genji Nakamura (Tokyo Electron Ltd.), Takashi Matsukawa (AIST)

9:45 AM - 10:00 AM

[F-5-03] Epitaxial SiGe/Si Multi-Stacks for CFET Devices

○Roger Loo1, Yosuke Shimura1, Anjani Akula1, Clement Porret1, Alex Merkulov1, Mustafa Ayyad1, Han Han1, Olivier Richard1, Andrea Impagnatiello1, Andriy Hikavyy1 (1. Imec (Belgium))

https://doi.org/10.7567/SSDM.2023.F-5-03

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