Channel and Transistor Stacking of Nanosheets

Chien-Te Tu

doi:https://doi.org/10.7567/SSDM.2023.F-7-01

Presentation information

Oral Presentation

01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[F-7] Advanced CMOS: Device Technology 1

Fri. Sep 8, 2023 1:30 PM - 3:15 PM Room F (224, Bldg. 2)

Session Chairs: Anabela Veloso (imec), Seungkwon Kim (Samsung Electronics)

1:30 PM - 2:00 PM

[F-7-01 (Invited)] Channel and Transistor Stacking of Nanosheets

Chien-Te Tu¹, Wan-Hsuan Hsieh¹, Yi-Chun Liu¹, Yu-Rui Chen¹, Bo-Wei Huang¹, Chun-Yi Cheng¹, ^○Chee Wee Liu¹ (1. National Taiwan Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2023.F-7-01

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Presentation information

[F-7] Advanced CMOS: Device Technology 1

[F-7-01 (Invited)] Channel and Transistor Stacking of Nanosheets

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