Ferroelectric Hf 0.5Zr 0.5O 2 Omega FET and CMOS Inverter with SiGe/Si Super-Lattice channel

Yi- Ju Yao

doi:https://doi.org/10.7567/SSDM.2023.F-7-03

2:15 PM - 2:30 PM

[F-7-03] Ferroelectric Hf _0.5Zr _0.5O ₂ Omega FET and CMOS Inverter with SiGe/Si Super-Lattice channel

^○Yi- Ju Yao¹, Ting-Yu Tseng², Ching-Ru Yang², Tsai-Jung Lin¹, Heng-Jia Chang², Guang-Li Luo³, Fu-Ju Hou³, Yung-Chun Wu² (1. College of Semiconductor Research, National Tsing Hua University (Taiwan), 2. Department of Engineering and System Science, National Tsing Hua University (Taiwan), 3. Taiwan Semiconductor Research Institute (Taiwan))

https://doi.org/10.7567/SSDM.2023.F-7-03

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Presentation information

[F-7] Advanced CMOS: Device Technology 1

[F-7-03] Ferroelectric Hf _0.5Zr _0.5O ₂ Omega FET and CMOS Inverter with SiGe/Si Super-Lattice channel

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Presentation information

[F-7] Advanced CMOS: Device Technology 1

[F-7-03] Ferroelectric Hf 0.5Zr 0.5O 2 Omega FET and CMOS Inverter with SiGe/Si Super-Lattice channel

Password

[F-7-03] Ferroelectric Hf _0.5Zr _0.5O ₂ Omega FET and CMOS Inverter with SiGe/Si Super-Lattice channel