2023 International Conference on Solid State Devices and Materials

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01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[F-7] Advanced CMOS: Device Technology 1

Fri. Sep 8, 2023 1:30 PM - 3:15 PM Room F (224, Bldg. 2)

Session Chairs: Anabela Veloso (imec), Seungkwon Kim (Samsung Electronics)

2:30 PM - 2:45 PM

[F-7-04] Monolithic heterogeneous Integration Inverter Consisting of Si (100) PMOSFET and Normally-off Al 2O 3/GaN NMOSFET

○Yutong Fan1,2, Weihang Zhang1,2, Xi Liu1, Yu Wen1, Zhihong Liu1,2, Shenglei Zhao1, Jincheng Zhang1,2, Yue Hao1,2 (1. Lab. of Wide Band-Gap Semiconductor Materials and Devices, School of Microelectronics, Univ. of Xidian (China), 2. Guangzhou wide bandgap semiconductor innovation center, inst. of Guangzhou technology, Univ. of Xidian (China))

https://doi.org/10.7567/SSDM.2023.F-7-04

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