Vertical-Transport Nanosheet Technology for Scaling beyond the Lateral-Transport Devices CMOS Era

Hemanth Jagannathan

doi:https://doi.org/10.7567/SSDM.2023.F-8-01

Presentation information

Oral Presentation

01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[F-8] Advanced CMOS: Device Technology 2

Fri. Sep 8, 2023 3:30 PM - 4:30 PM Room F (224, Bldg. 2)

Session Chairs: Keisuke Yamamoto (Kyushu Univ), Anabela Veloso (imec)

3:30 PM - 4:00 PM

[F-8-01 (Invited)] Vertical-Transport Nanosheet Technology for Scaling beyond the Lateral-Transport Devices CMOS Era

^○Hemanth Jagannathan¹ (1. IBM Research (United States of America))

https://doi.org/10.7567/SSDM.2023.F-8-01

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Presentation information

[F-8] Advanced CMOS: Device Technology 2

[F-8-01 (Invited)] Vertical-Transport Nanosheet Technology for Scaling beyond the Lateral-Transport Devices CMOS Era

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