Vertical-Transport Nanosheet Technology for Scaling beyond the Lateral-Transport Devices CMOS Era

Hemanth Jagannathan

doi:https://doi.org/10.7567/SSDM.2023.F-8-01

講演情報

Oral Presentation

01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[F-8] Advanced CMOS: Device Technology 2

2023年9月8日(金) 15:30 〜 16:30 Room F (224, Bldg. 2)

Session Chairs: Keisuke Yamamoto (Kyushu Univ), Anabela Veloso (imec)

15:30 〜 16:00

[F-8-01 (Invited)] Vertical-Transport Nanosheet Technology for Scaling beyond the Lateral-Transport Devices CMOS Era

^○Hemanth Jagannathan¹ (1. IBM Research (United States of America))

https://doi.org/10.7567/SSDM.2023.F-8-01

Abstract password authentication.
A password is required to view abstracts. You can find the password in the "Advance Program".The "Advance Program" is handed out at the registration desk to registered participants.

講演情報

[F-8] Advanced CMOS: Device Technology 2

[F-8-01 (Invited)] Vertical-Transport Nanosheet Technology for Scaling beyond the Lateral-Transport Devices CMOS Era

パスワード