2023 International Conference on Solid State Devices and Materials

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Oral Presentation

01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[F-8] Advanced CMOS: Device Technology 2

Fri. Sep 8, 2023 3:30 PM - 4:30 PM Room F (224, Bldg. 2)

Session Chairs: Keisuke Yamamoto (Kyushu Univ), Anabela Veloso (imec)

4:00 PM - 4:15 PM

[F-8-02] Holistic Analysis of Asymmetry in Vertical Silicon Gate-all-around Nanosheet FETs

○Jinsu Jeong1, Sanguk Lee1, Seunghwan Lee1, Junjong Lee1, Jaewan Lim1, Rock-Hyun Baek1 (1. Pohang Univ. of Sci. and Tech. (POSTECH) (Korea))

https://doi.org/10.7567/SSDM.2023.F-8-02

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