2023 International Conference on Solid State Devices and Materials

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Oral Presentation

01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[F-8] Advanced CMOS: Device Technology 2

Fri. Sep 8, 2023 3:30 PM - 4:30 PM Room F (224, Bldg. 2)

Session Chairs: Keisuke Yamamoto (Kyushu Univ), Anabela Veloso (imec)

4:15 PM - 4:30 PM

[F-8-03] 3D Stack Ultra High Resistance Via Matrix by Cu BEOL Structuresin Nano-scaled CMOS Processing Node

Li-Yu Yeh1, ○Ya-Lin Chang1, Yue-Der Chih2, Jonathan Chang2, Chrong-Jung Lin1, Ya-Chin King1 (1. National Tsing Hua University (Taiwan), 2. Design Technology Platform, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan (Taiwan))

https://doi.org/10.7567/SSDM.2023.F-8-03

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