Effects of Tri-Methyl-Aluminum Introduced into Vinylsilane on SiC Thin Film by Using Chemical Vapor Deposition

Yuuki Tsuchiizu

doi:https://doi.org/10.7567/SSDM.2023.G-4-03

11:15 AM - 11:30 AM

[G-4-03] Effects of Tri-Methyl-Aluminum Introduced into Vinylsilane on SiC Thin Film by Using Chemical Vapor Deposition

^○Yuuki Tsuchiizu¹, Kennichi Uehara², Sigeo Yasuhara², Wakana Takeuchi¹ (1. Aichi Inst. of Tech. (Japan), 2. Japan Advanced Chemicals Ltd. (Japan))

https://doi.org/10.7567/SSDM.2023.G-4-03

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Presentation information

[G-4] Advanced Metallization II

[G-4-03] Effects of Tri-Methyl-Aluminum Introduced into Vinylsilane on SiC Thin Film by Using Chemical Vapor Deposition

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