2023 International Conference on Solid State Devices and Materials

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Focus Session

Focus Session (Area 1&3)

[G-6] Heterogenous Integration for High Performance Computing; System, Material, Process and Chiplet II

Fri. Sep 8, 2023 10:45 AM - 12:00 PM Room G (231, Bldg. 2)

Session Chairs: Takeshi Nogami (IBM Research), Nicolas Planes (STMicroelectronics)

11:45 AM - 12:00 PM

[G-6-03] Effect of Passivation Layer on Wafer Warpage

○Wei Feng1, Haruo Shimamoto1, Katsuya Kikuchi1 (1. National Inst. of Advanced Indus. Sci. and Tech. (AIST) (Japan))

https://doi.org/10.7567/SSDM.2023.G-6-03

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