Development of a 200 mm Wafer Silicon Nitride PIC Environment for Graphene Electro-Absorption Modulators

Rasuole Lukose

doi:https://doi.org/10.7567/SSDM.2023.H-7-05

14:45 〜 15:00

[H-7-05] Development of a 200 mm Wafer Silicon Nitride PIC Environment for Graphene Electro-Absorption Modulators

^○Rasuole Lukose¹, Marco Lisker^1,2, Pawan Kumar Dubey¹, Md Ashraful Islam Raju¹, Anna Peczek¹, Aleksandra Kroh¹, Mindaugas Lukosius¹, Andreas Mai^1,2 (1. IHP- Leibniz Institut für innovative Mikroelektronik (Germany), 2. Technical University of Applied Science Wildau (Germany))

https://doi.org/10.7567/SSDM.2023.H-7-05

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講演情報

[H-7] Si Photonics

[H-7-05] Development of a 200 mm Wafer Silicon Nitride PIC Environment for Graphene Electro-Absorption Modulators

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